Simulation of Linear Cluster Tool based on Supervisor Control

  • We consider the application of supervisory control into a linear cluster tool, wafer making process which requires wafers to travel through all processing machines without any conflict anddeadlock. Automata models are built to replicate the behaviors of the system, then the supervisor is designed. Lastly, the supervisor is applied into a virtual plant and the simulation results can be evaluated.

Distributed Scheduling a Set of E-puck Robots with Adaptive Control